Characterization of hydrogen etched 6h-sic(0001) substrates and subsequently grown AlN films.

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dc.date.accessioned2008-05-09T20:47:18Z
dc.date.available2008-05-09T20:47:18Z
dc.date.issued2003
dc.format.extent1037689 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationHartman, J. D., Roskowski, A. M., Reitmeier, Z. J., Tracy, K. M., Davis, R. F., & Nemanich, R. J. (2003). Characterization of hydrogen etched 6h-sic(0001) substrates and subsequently grown AlN films. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 21(2), 394-400.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/715
dc.language.isoen
dc.titleCharacterization of hydrogen etched 6h-sic(0001) substrates and subsequently grown AlN films.
dc.typeArticle

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