Method of forming epitaxial silicon-comprising material
| dc.date.accessioned | 2008-10-17T18:41:59Z | |
| dc.date.available | 2008-10-17T18:41:59Z | |
| dc.date.issued | 2006 | |
| dc.format.extent | 137331 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Ramaswamy, N., Sandhu, G. S., Basceri, C., & Blomiley, E. R. (2006). Method of forming epitaxial silicon-comprising material. U.S. Patent No. 7,144,779. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1759 | |
| dc.language.iso | en | |
| dc.title | Method of forming epitaxial silicon-comprising material | |
| dc.type | Patent |
