Method of providing a structure using self-aligned features

dc.date.accessioned2008-10-14T17:27:42Z
dc.date.available2008-10-14T17:27:42Z
dc.date.issued2004
dc.format.extent142519 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationChopra, D., Donohoe, K. G., & Basceri, C. (2004). Method of providing a structure using self-aligned features. U.S. Patent No. 6,759,330. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1445
dc.language.isoen
dc.titleMethod of providing a structure using self-aligned features
dc.typePatent

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