Method for controlling deposition of dielectric films

Simple item page
dc.date.accessioned2008-10-14T17:24:51Z
dc.date.available2008-10-14T17:24:51Z
dc.date.issued2003
dc.format.extent131424 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationBasceri, C., Gealy, D., & Sandhu, G. S. (2003). Method for controlling deposition of dielectric films. U.S. Patent No. 6,566,147. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1442
dc.language.isoen
dc.titleMethod for controlling deposition of dielectric films
dc.typePatent

Files

Original bundle

Now showing 1 - 1 of 1
No Thumbnail Available
Name:
US_6566147_B2_I.pdf
Size:
128.34 KB
Format:
Adobe Portable Document Format
Download

License bundle

Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.76 KB
Format:
Plain Text
Description:
Download

Collections

Publications