Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device

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dc.date.accessioned2008-10-17T18:56:06Z
dc.date.available2008-10-17T18:56:06Z
dc.date.issued2007
dc.format.extent165779 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationCross, J. S., Tsukada, M., Horii, Y., Gruverman, A., & Kingon, A. (2007). Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device. U.S. Patent No. 7,241,656. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1775
dc.language.isoen
dc.titleSemiconductor device and its manufacture method, and measurement fixture for the semiconductor device
dc.typePatent

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