Ferroelectric film prope rty measuring device, measuring method therefor and measuring method for semiconductor memory units

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dc.date.accessioned2008-10-13T19:18:33Z
dc.date.available2008-10-13T19:18:33Z
dc.date.issued2002
dc.format.extent144242 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationGruverman, A. (2002). Ferroelectric film property measuring device, measuring method therefor and measuring method for semiconductor memory units. U.S. Patent No. 6,466,039. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1286
dc.language.isoen
dc.titleFerroelectric film prope rty measuring device, measuring method therefor and measuring method for semiconductor memory units
dc.typePatent

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