Electron traps at interfaces between Si(100) and noncrystalline Al2O3, Ta2O5, and (Ta2O5)(x)(Al2O3)(1-x) alloys
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2001
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Johnson, R. S., Hong, J. G., & Lucovsky, G. (2001). Electron traps at interfaces between Si(100) and noncrystalline Al2O3, Ta2O5, and (Ta2O5)(x)(Al2O3)(1-x) alloys. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 19(4), 1606-1610.
