Chemically enhanced focused ion beam micro-machining of copper

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dc.date.accessioned2008-07-23T15:37:36Z
dc.date.available2008-07-23T15:37:36Z
dc.date.issued2003
dc.format.extent77674 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationRussell, P. E., Griffis, D. P., & Gonzales Perez, J. C. (2003). Chemically enhanced focused ion beam micro-machining of copper. U.S. Patent No. 6,514,866. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/934
dc.language.isoen
dc.titleChemically enhanced focused ion beam micro-machining of copper
dc.typePatent

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