Refractory metal capped low resistivity metal conductor lines and vias

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dc.date.accessioned2008-10-14T16:11:36Z
dc.date.available2008-10-14T16:11:36Z
dc.date.issued1999
dc.format.extent159037 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationJoshi, R. V., Cuomo, J. J., Dalal, H. M., & Hsu, L. L. (1999). Refractory metal capped low resistivity metal conductor lines and vias. U.S. Patent No. 5,889,328. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1407
dc.language.isoen
dc.titleRefractory metal capped low resistivity metal conductor lines and vias
dc.typePatent

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