3D Nanofabrication Using AFM-Based Ultrasonic Vibration Assisted Nanomachining.

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dc.contributor.advisorJingyan Dong, Co-Chair
dc.contributor.advisorPaul Cohen, Co-Chair
dc.contributor.advisorChih-Hao Chang, Minor
dc.contributor.advisorYuan-Shin Lee, Member
dc.contributor.advisorConsuelo Arellano, Graduate School Representative
dc.contributor.authorDeng, Jia
dc.date.accepted2017-08-25
dc.date.accessioned2017-10-31T12:32:06Z
dc.date.available2017-10-31T12:32:06Z
dc.date.defense2017-07-18
dc.date.issued2017-07-18
dc.date.released2017-10-31
dc.date.reviewed2017-08-02
dc.date.submitted2017-07-18
dc.degree.disciplineIndustrial Engineering
dc.degree.leveldissertation
dc.degree.nameDoctor of Philosophy
dc.descriptionNorth Carolina State University Theses Industrial Engineering.
dc.formatPh.D. North Carolina State University, 2017.
dc.identifier.otherdeg6961
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.20/34702
dc.rights
dc.title3D Nanofabrication Using AFM-Based Ultrasonic Vibration Assisted Nanomachining.
dcterms.extent1 online resource (xiii, 168 pages) : illustrations

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