Semiconductor switching devices having buried gate electrodes and methods of forming same
No Thumbnail Available
Date
1999
Authors
Advisors
Journal Title
Series/Report No.
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Citation
Baliga, B. J. (1999). Semiconductor switching devices having buried gate electrodes and methods of forming same. U.S. Patent No. 5,912,497. Washington, DC: U.S. Patent and Trademark Office.
