Design and Fabrication of a MEMS Pressure Sensor and Developing a Release Protocol for MEMS
| dc.contributor.advisor | Dr. Paul D. Franzon, Committee Chair | en_US |
| dc.contributor.advisor | Dr. Christine S. Grant, Committee Co-Chair | en_US |
| dc.contributor.advisor | Dr. Griff Bilbro, Committee Member | en_US |
| dc.contributor.author | Bhate, Kaustubh Ramesh | en_US |
| dc.date.accessioned | 2010-04-02T18:03:13Z | |
| dc.date.available | 2010-04-02T18:03:13Z | |
| dc.date.issued | 2002-08-28 | en_US |
| dc.degree.discipline | Electrical Engineering | en_US |
| dc.degree.level | thesis | en_US |
| dc.degree.name | MS | en_US |
| dc.description.abstract | This presents the design and fabrication of a MEMS Pressure Sensor for application in the Textile Industry. The transducer element in the sensor is a piezoresistive device. The Pressure Sensor layout is made in Cadence-Virtuoso and a 3-D Model is simulated in MEMCAD. Calculated and simulated results are compared. Processing steps are carried out in the NCSU Cleanroom to fabricate the device. A part of this thesis also attempts to develop a Release Protocol for MEMS devices made in the SUMMIT process. SUMMIT chips are released by wet etching in HF followed by rinsing in Methanol. The released device is then observed under Optical Microscope for results. Cantilever beams are also designed in SUMMIT process to be tested electrically when they come back after being fabricated at Sandia National Laboratories. | en_US |
| dc.identifier.other | etd-08132002-120836 | en_US |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.16/1323 | |
| dc.rights | I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. I hereby grant to NC State University or its agents the non-exclusive license to archive and make accessible, under the conditions specified below, my thesis, dissertation, or project report in whole or in part in all forms of media, now or hereafter known. I retain all other ownership rights to the copyright of the thesis, dissertation or project report. I also retain the right to use in future works (such as articles or books) all or part of this thesis, dissertation, or project report. | en_US |
| dc.subject | mems | en_US |
| dc.subject | release | en_US |
| dc.subject | pressure sensor | en_US |
| dc.subject | stiction | en_US |
| dc.title | Design and Fabrication of a MEMS Pressure Sensor and Developing a Release Protocol for MEMS | en_US |
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