Structure and method to fabricate self-aligned transistors with dual work function metal gate electrodes
dc.date.accessioned | 2008-10-13T21:37:52Z | |
dc.date.available | 2008-10-13T21:37:52Z | |
dc.date.issued | 2006 | |
dc.format.extent | 130607 bytes | |
dc.format.mimetype | application/pdf | |
dc.identifier.citation | Chambers, J. J. (2006). Structure and method to fabricate self-aligned transistors with dual work function metal gate electrodes. U.S. Patent No. 7,005,365. Washington, DC: U.S. Patent and Trademark Office. | |
dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1328 | |
dc.language.iso | en | |
dc.title | Structure and method to fabricate self-aligned transistors with dual work function metal gate electrodes | |
dc.type | Patent |