Hollow cathode enhanced magnetron sputter device

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dc.date.accessioned2008-10-14T18:55:21Z
dc.date.available2008-10-14T18:55:21Z
dc.date.issued1986
dc.format.extent101565 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationCuomo, J. J., Kafuman, H. R., & Rossnagel, S. M. (1986). Hollow cathode enhanced magnetron sputter device. U.S. Patent No. 4,588,490. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1502
dc.language.isoen
dc.titleHollow cathode enhanced magnetron sputter device
dc.typePatent

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