Reactors having gas distributors and methods for epositing materials onto micro-device workpieces

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dc.date.accessioned2008-10-13T20:00:46Z
dc.date.available2008-10-13T20:00:46Z
dc.date.issued2005
dc.format.extent155305 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationBasceri, C., & Sandhu, G. S. (2005). Reactors having gas distributors and methods for depositing materials onto micro-device workpieces. U.S. Patent No. 6,884,296. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1304
dc.language.isoen
dc.titleReactors having gas distributors and methods for epositing materials onto micro-device workpieces
dc.typePatent

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