Normal incidence rotating compensator ellipsometer

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dc.date.accessioned2008-10-14T17:33:12Z
dc.date.available2008-10-14T17:33:12Z
dc.date.issued2008
dc.format.extent131074 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationAspnes, D. E. (2008). Normal incidence rotating compensator ellipsometer. U.S. Patent No. 7,355,708. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1450
dc.language.isoen
dc.titleNormal incidence rotating compensator ellipsometer
dc.typePatent

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