Methods of spin cleaning substrates using carbon dioxide liquid
dc.date.accessioned | 2008-07-17T20:41:46Z | |
dc.date.available | 2008-07-17T20:41:46Z | |
dc.date.issued | 2001 | |
dc.format.extent | 67423 bytes | |
dc.format.mimetype | application/pdf | |
dc.identifier.citation | DeSimone, J. M., & Carbonell, R. G. (2001). Methods of spin cleaning substrates using carbon dioxide liquid. U.S. Patent No. 6,240,936. Washington, DC: U.S. Patent and Trademark Office. | |
dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/748 | |
dc.language.iso | en | |
dc.title | Methods of spin cleaning substrates using carbon dioxide liquid | |
dc.type | Patent |