Methods of spin cleaning substrates using carbon dioxide liquid

dc.date.accessioned2008-07-17T20:41:46Z
dc.date.available2008-07-17T20:41:46Z
dc.date.issued2001
dc.format.extent67423 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationDeSimone, J. M., & Carbonell, R. G. (2001). Methods of spin cleaning substrates using carbon dioxide liquid. U.S. Patent No. 6,240,936. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/748
dc.language.isoen
dc.titleMethods of spin cleaning substrates using carbon dioxide liquid
dc.typePatent

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