Supercritical fluid technology for cleaning processing chambers and systems

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dc.date.accessioned2008-10-17T21:04:48Z
dc.date.available2008-10-17T21:04:48Z
dc.date.issued2008
dc.format.extent140826 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationBasceri, C., & Sandhu, G. S. (2008). Supercritical fluid technology for cleaning processing chambers and systems. U.S. Patent No. 7,323,064. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1824
dc.language.isoen
dc.titleSupercritical fluid technology for cleaning processing chambers and systems
dc.typePatent

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