The Simulation of Integrated Tool Performance in Semiconductor Manufacturing

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dc.contributor.authorMauer, John L.
dc.contributor.authorSchelasin, Roland E. A.
dc.date.accessioned2012-01-12T18:50:22Z
dc.date.available2012-01-12T18:50:22Z
dc.date.issued1993
dc.format.extent609293 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.4/6575
dc.language.isoen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.ispartofseriesWinter Simulation Conference Proceedings
dc.titleThe Simulation of Integrated Tool Performance in Semiconductor Manufacturing
dc.typeTechnical report

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