Method for depositing in particular crystalline layers, and device for carrying out the method

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dc.date.accessioned2008-10-17T18:01:20Z
dc.date.available2008-10-17T18:01:20Z
dc.date.issued2005
dc.format.extent170417 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationBremser, M., Dauelsberg, M., & Strauch, G. K. (2005). Method for depositing in particular crystalline layers, and device for carrying out the method. U.S. Patent No. 6,972,050. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1718
dc.language.isoen
dc.titleMethod for depositing in particular crystalline layers, and device for carrying out the method
dc.typePatent

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