Simulation Through Explicit State Description and Its Application to Semiconductor Fab Operation

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dc.contributor.authorFujihara, Mutsumi
dc.contributor.authorYoneda, Kiyoshi
dc.date.accessioned2012-01-12T18:51:26Z
dc.date.available2012-01-12T18:51:26Z
dc.date.issued1992
dc.format.extent1084484 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.4/6941
dc.language.isoen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.ispartofseriesWinter Simulation Conference Proceedings
dc.titleSimulation Through Explicit State Description and Its Application to Semiconductor Fab Operation
dc.typeTechnical report

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