Development of Microelectromechanical Systems for Advanced Nanomechanical Characterization.

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dc.contributor.advisorYong Zhu, Chair
dc.contributor.advisorXiaoning Jiang, Member
dc.contributor.advisorFen Wu, Member
dc.contributor.advisorJingyan Dong, Member
dc.contributor.authorLi, Chengjun
dc.date.accepted2019-04-11
dc.date.accessioned2019-04-18T12:30:29Z
dc.date.available2019-04-18T12:30:29Z
dc.date.defense2019-01-04
dc.date.issued2019-01-04
dc.date.released2019-04-18
dc.date.reviewed2019-01-09
dc.date.submitted2019-01-06
dc.degree.disciplineMechanical Engineering
dc.degree.leveldissertation
dc.degree.nameDoctor of Philosophy
dc.descriptionNorth Carolina State University Theses Mechanical and Aerospace Engineering.
dc.formatPh.D. North Carolina State University, 2019.
dc.identifier.otherdeg13445
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.20/36549
dc.rights
dc.titleDevelopment of Microelectromechanical Systems for Advanced Nanomechanical Characterization.
dcterms.extent1 online resource (x, 99 pages) : illustrations (some color)

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