Programmable ion beam patterning system
| dc.date.accessioned | 2008-10-14T18:50:36Z | |
| dc.date.available | 2008-10-14T18:50:36Z | |
| dc.date.issued | 1985 | |
| dc.format.extent | 117939 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Cuomo, J. J., Harper, J. M., Kafuman, H. R., & Speidell, J. L. (1985). Programmable ion beam patterning system. U.S. Patent No. 4,523,971. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1496 | |
| dc.language.iso | en | |
| dc.title | Programmable ion beam patterning system | |
| dc.type | Patent |
