Patterning methods and systems using reflected interference patterns
| dc.date.accessioned | 2008-10-17T18:11:59Z | |
| dc.date.available | 2008-10-17T18:11:59Z | |
| dc.date.issued | 2005 | |
| dc.format.extent | 130897 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Herr, D. J. C., & Joy, D. C. (2005). Patterning methods and systems using reflected interference patterns. U.S. Patent No. 6,967,067. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1727 | |
| dc.language.iso | en | |
| dc.title | Patterning methods and systems using reflected interference patterns | |
| dc.type | Patent |
