Broadband spectroscopic rotating compensator ellipsometer

Simple item page
dc.date.accessioned2008-10-16T15:57:22Z
dc.date.available2008-10-16T15:57:22Z
dc.date.issued1999
dc.format.extent163261 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationAspnes, D. E., & Opsal, J. (1999). Broadband spectroscopic rotating compensator ellipsometer. U.S. Patent No. 5,877,859. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1635
dc.language.isoen
dc.titleBroadband spectroscopic rotating compensator ellipsometer
dc.typePatent

Files

Original bundle

Now showing 1 - 1 of 1
No Thumbnail Available
Name:
US_5877859_A_I.pdf
Size:
159.43 KB
Format:
Adobe Portable Document Format
Download

License bundle

Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.76 KB
Format:
Plain Text
Description:
Download

Collections

Publications