Cathodoluminescence spectroscopy of nitrided SiO2-Si interfaces

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1999

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Young, A. P., Bandhu, R., Schafer, J., Niimi, H., & Lucovsky, G. (1999). Cathodoluminescence spectroscopy of nitrided SiO2-Si interfaces. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 17(4), 1258-1262.

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