Intrinsic limitations on ultimate device performance and reliability at (i) semiconductor-dielectric interfaces and (ii) internal interfaces in stacked dielectrics
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2000
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Lucovsky, G., Yang, H., Niimi, H., Thorpe, M. F., & Phillips, J. C. (2000). Intrinsic limitations on ultimate device performance and reliability at (i) semiconductor-dielectric interfaces and (ii) internal interfaces in stacked dielectrics. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 18(4), 2179-2186.
