Semiconductor structures with trench contacts

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dc.date.accessioned2008-10-13T18:56:24Z
dc.date.available2008-10-13T18:56:24Z
dc.date.issued2003
dc.format.extent115664 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationHuang, Q. (2003). Semiconductor structures with trench contacts. U.S. Patent No. 6,630,711. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1270
dc.language.isoen
dc.titleSemiconductor structures with trench contacts
dc.typePatent

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