Development of a High Throughput Nano-Positioning System with Applications in Micro-Manufacturing.

dc.contributor.advisorJingyan Dong, Committee Chairen_US
dc.contributor.advisorYong Zhu, Committee Memberen_US
dc.contributor.advisorYuan-Shin Lee, Committee Memberen_US
dc.contributor.authorPolit, Sebastianen_US
dc.date.accepted2010-05-17en_US
dc.date.accessioned2010-05-18T07:00:15Z
dc.date.available2010-05-18T07:00:15Z
dc.date.defense2010-04-07en_US
dc.date.issued2010-04-07en_US
dc.date.released2010-05-18en_US
dc.date.reviewed2010-04-08en_US
dc.date.submitted2010-04-07en_US
dc.degree.disciplineIndustrial Engineeringen_US
dc.degree.levelthesisen_US
dc.degree.nameMaster of Scienceen_US
dc.identifier.otherdeg2en_US
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.16/5979
dc.rightsI hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. I hereby grant to NC State University or its agents the non-exclusive license to archive and make accessible, under the conditions specified below, my thesis, dissertation, or project report in whole or in part in all forms of media, now or hereafter known. I retain all other ownership rights to the copyright of the thesis, dissertation or project report. I also retain the right to use in future works (such as articles or books) all or part of this thesis, dissertation, or project report.en_US
dc.titleDevelopment of a High Throughput Nano-Positioning System with Applications in Micro-Manufacturing.en_US

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