Broadband spectroscopic rotating compensator ellipsometer

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dc.date.accessioned2008-10-16T18:26:33Z
dc.date.available2008-10-16T18:26:33Z
dc.date.issued2003
dc.format.extent156449 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationAspnes, D. E., & Opsal, J. (2003). Broadband spectroscopic rotating compensator ellipsometer. U.S. Patent No. 6,650,415. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1691
dc.language.isoen
dc.titleBroadband spectroscopic rotating compensator ellipsometer
dc.typePatent

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