Fabrication of Subwavelength Periodic Nanostructures using Immersion Interference Lithography.

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dc.contributor.advisorChih-Hao Chang, Chairen_US
dc.contributor.advisorXiaoning Jiang, Memberen_US
dc.contributor.advisorYong Zhu, Memberen_US
dc.contributor.authorBagal, Abhijeet Subhashraoen_US
dc.date.accepted2012-11-28en_US
dc.date.accessioned2012-11-30T06:31:46Z
dc.date.available2012-11-30T06:31:46Z
dc.date.defense2012-11-09en_US
dc.date.issued2012-11-09en_US
dc.date.released2012-11-30en_US
dc.date.reviewed2012-11-14en_US
dc.date.submitted2012-11-09en_US
dc.degree.disciplineMechanical Engineeringen_US
dc.degree.levelthesisen_US
dc.degree.nameMaster of Scienceen_US
dc.identifier.otherdeg2198en_US
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.16/8217
dc.rightsen_US
dc.titleFabrication of Subwavelength Periodic Nanostructures using Immersion Interference Lithography.en_US

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