Methods of forming hafnium-containing materials, methods of forming hafnium oxide, and capacitor constructions comprising hafnium oxide
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2004
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Basceri, C., Gealy, F. D., & Sandhu, G. S. (2004). Methods of forming hafnium-containing materials, methods of forming hafnium oxide, and capacitor constructions comprising hafnium oxide. U.S. Patent No. 6,785,120. Washington, DC: U.S. Patent and Trademark Office.
