Methods of forming hafnium-containing materials, methods of forming hafnium oxide, and capacitor constructions comprising hafnium oxide
| dc.date.accessioned | 2008-10-14T14:57:43Z | |
| dc.date.available | 2008-10-14T14:57:43Z | |
| dc.date.issued | 2004 | |
| dc.format.extent | 147989 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Basceri, C., Gealy, F. D., & Sandhu, G. S. (2004). Methods of forming hafnium-containing materials, methods of forming hafnium oxide, and capacitor constructions comprising hafnium oxide. U.S. Patent No. 6,785,120. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1376 | |
| dc.language.iso | en | |
| dc.title | Methods of forming hafnium-containing materials, methods of forming hafnium oxide, and capacitor constructions comprising hafnium oxide | |
| dc.type | Patent |
