Method of fabricating an integrated circuit interconnection

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US_5268329_A_I.pdf (158.2 KB)

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1993

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Chittipeddi, S., & Kelly, M. J. (1993). Method of fabricating an integrated circuit interconnection. U.S. Patent No. 5,268,329. Washington, DC: U.S. Patent and Trademark Office.

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http://www.lib.ncsu.edu/resolver/1840.2/1586

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