Normal incidence rotating compensator ellipsometer

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dc.date.accessioned2008-10-17T18:59:49Z
dc.date.available2008-10-17T18:59:49Z
dc.date.issued2007
dc.format.extent141753 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationAspnes, D. E. (2007). Normal incidence rotating compensator ellipsometer. U.S. Patent No. 7,173,700. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1778
dc.language.isoen
dc.titleNormal incidence rotating compensator ellipsometer
dc.typePatent

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