Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication
| dc.date.accessioned | 2008-10-14T16:05:44Z | |
| dc.date.available | 2008-10-14T16:05:44Z | |
| dc.date.issued | 2007 | |
| dc.format.extent | 162311 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Quevedo-Lopez, M., Chambers, J. J., & Olsen, L. C. (2007). Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication. U.S. Patent No. 7,199,021. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1401 | |
| dc.language.iso | en | |
| dc.title | Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication | |
| dc.type | Patent |
