Method for producing low thermal budget ferroelectric thin films for integrated device structures using laser-crystallization of spin-on sol-gel films
| dc.date.accessioned | 2008-10-15T23:16:07Z | |
| dc.date.available | 2008-10-15T23:16:07Z | |
| dc.date.issued | 1997 | |
| dc.format.extent | 172301 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Varshney, U., & Kingon, A. I. (1997). Method for producing low thermal budget ferroelectric thin films for integrated device structures using laser-crystallization of spin-on sol-gel films. U.S. Patent No. 5,626,670. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1618 | |
| dc.language.iso | en | |
| dc.title | Method for producing low thermal budget ferroelectric thin films for integrated device structures using laser-crystallization of spin-on sol-gel films | |
| dc.type | Patent |
