MIM capacitor with metal nitride electrode materials and method of formation
No Thumbnail Available
Date
2004
Authors
Advisors
Journal Title
Series/Report No.
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Citation
Basceri, C., & Graettinger, T. M. (2004). MIM capacitor with metal nitride electrode materials and method of formation. U.S. Patent No. 6,753,618. Washington, DC: U.S. Patent and Trademark Office.
