Methods of controlling oxygen partial pressure during annealing of a perovskite dielectric layer

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dc.date.accessioned2008-07-24T15:00:48Z
dc.date.available2008-07-24T15:00:48Z
dc.date.issued2005
dc.format.extent68502 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationMaria, J.-P., & Kingon, A. I. (2005). Methods of controlling oxygen partial pressure during annealing of a perovskite dielectric layer. U.S. Patent No. 6,936,301. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1019
dc.language.isoen
dc.titleMethods of controlling oxygen partial pressure during annealing of a perovskite dielectric layer
dc.typePatent

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