Sub 100A range line width pattern fabrication
| dc.date.accessioned | 2008-10-14T18:07:39Z | |
| dc.date.available | 2008-10-14T18:07:39Z | |
| dc.date.issued | 1980 | |
| dc.format.extent | 123547 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Broers, A. N., Cuomo, J. J., Laibowitz, R. B., & Molzen, W. W. (1980). Sub 100A range line width pattern fabrication. U.S. Patent No. 4,197,332. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1474 | |
| dc.language.iso | en | |
| dc.title | Sub 100A range line width pattern fabrication | |
| dc.type | Patent |
