Method for water vapor enhanced charged-particle-beam machining
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2000
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Russell, P. E., Griffis, D. P., Shedd, G. M., Stark, T. J., & Vitarelli, J. (2000). Method for water vapor enhanced charged-particle-beam machining. U.S. Patent No. 6,140,655. Washington, DC: U.S. Patent and Trademark Office.
