Method for water vapor enhanced charged-particle-beam machining

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dc.date.accessioned2008-07-21T21:27:01Z
dc.date.available2008-07-21T21:27:01Z
dc.date.issued2000
dc.format.extent77944 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationRussell, P. E., Griffis, D. P., Shedd, G. M., Stark, T. J., & Vitarelli, J. (2000). Method for water vapor enhanced charged-particle-beam machining. U.S. Patent No. 6,140,655. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/864
dc.language.isoen
dc.titleMethod for water vapor enhanced charged-particle-beam machining
dc.typePatent

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