A MEMS Infrared Thermopile Fabricated from Silicon-On-Insulator with Phononic Crystal Structures and Carbon Nanotube Absorption Layer.

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dc.contributor.advisorJohn Muth, Chairen_US
dc.contributor.advisorRobert Kolbas, Memberen_US
dc.contributor.advisorMehmet Ozturk, Memberen_US
dc.contributor.advisorYong Zhu, Memberen_US
dc.contributor.authorGray, Kory Forresten_US
dc.date.accepted2016-04-08en_US
dc.date.accessioned2016-04-22T12:32:34Z
dc.date.available2016-04-22T12:32:34Z
dc.date.defense2016-03-29en_US
dc.date.issued2016-03-29en_US
dc.date.released2016-04-22en_US
dc.date.reviewed2016-03-11en_US
dc.date.submitted2016-02-29en_US
dc.degree.disciplineElectrical Engineeringen_US
dc.degree.leveldissertationen_US
dc.degree.nameDoctor of Philosophyen_US
dc.identifier.otherdeg4954en_US
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.16/11099
dc.titleA MEMS Infrared Thermopile Fabricated from Silicon-On-Insulator with Phononic Crystal Structures and Carbon Nanotube Absorption Layer.en_US

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