Method of forming conductive metal silicides by reaction of metal with silicon
| dc.date.accessioned | 2008-10-17T21:10:23Z | |
| dc.date.available | 2008-10-17T21:10:23Z | |
| dc.date.issued | 2008 | |
| dc.format.extent | 130642 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Basceri, C. (2008). Method of forming conductive metal silicides by reaction of metal with silicon. U.S. Patent No. 7,358,188. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1830 | |
| dc.language.iso | en | |
| dc.title | Method of forming conductive metal silicides by reaction of metal with silicon | |
| dc.type | Patent |
