American Vacuum Society leadership in electronic materials processing: Past, present, and future

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dc.date.accessioned2008-02-22T23:18:14Z
dc.date.available2008-02-22T23:18:14Z
dc.date.issued2003
dc.format.extent41709 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationLucovsky, G., & Rubloff, G. (2003). American Vacuum Society leadership in electronic materials processing: Past, present, and future. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 21(5), S175-S181.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/253
dc.language.isoen
dc.titleAmerican Vacuum Society leadership in electronic materials processing: Past, present, and future
dc.typeArticle

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