Spectroscopic study of chemical phase separation in zirconium silicate alloys
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2003
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Rayner, G. B., Kang, D., & Lucovsky, G. (2003). Spectroscopic study of chemical phase separation in zirconium silicate alloys. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 21(4), 1783-1791.
