Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces

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dc.date.accessioned2008-10-17T19:15:39Z
dc.date.available2008-10-17T19:15:39Z
dc.date.issued2007
dc.format.extent135181 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationZhaeng, L. A., Doan, T. T., Breiner, L. D., Ping, E. X., Weimer, R. A., Kubista, D. J., Beaman, K. L., & Basceri, C. (2007). Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces. U.S. Patent No. 7,235,138. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1794
dc.language.isoen
dc.titleMicrofeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces
dc.typePatent

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