Methods for cleaning microelectronic structures with aqueous carbon dioxide systems
| dc.date.accessioned | 2008-10-15T21:05:53Z | |
| dc.date.available | 2008-10-15T21:05:53Z | |
| dc.date.issued | 2003 | |
| dc.format.extent | 140562 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | DeYoung, J. P., McClain, J. B., Gross, S. M., & Simone, J. M. (2003). Methods for cleaning microelectronic structures with aqueous carbon dioxide systems. U.S. Patent No. 6,641,678. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1540 | |
| dc.language.iso | en | |
| dc.title | Methods for cleaning microelectronic structures with aqueous carbon dioxide systems | |
| dc.type | Article |
