Method of providing a structure using self-aligned features
| dc.date.accessioned | 2008-10-17T18:43:52Z | |
| dc.date.available | 2008-10-17T18:43:52Z | |
| dc.date.issued | 2006 | |
| dc.format.extent | 140130 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Chopra, D., Donahoe, K. G., & Basceri, C. (2006). Method of providing a structure using self-aligned features. U.S. Patent No. 7,109,112. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1761 | |
| dc.language.iso | en | |
| dc.title | Method of providing a structure using self-aligned features | |
| dc.type | Patent |
