A Comparison Study of the Logic of Four Wafer Fabrication Simulators

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dc.contributor.authorMason, Scott J.
dc.contributor.authorJensen, Paul A.
dc.contributor.authorFowler, John W.
dc.date.accessioned2012-01-12T18:49:06Z
dc.date.available2012-01-12T18:49:06Z
dc.date.issued1996
dc.format.extent1181355 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.4/6194
dc.language.isoen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.ispartofseriesWinter Simulation Conference Proceedings
dc.titleA Comparison Study of the Logic of Four Wafer Fabrication Simulators
dc.typeTechnical report

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